CMP Materials

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Hard PAD:

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Soft PAD:

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‧The Top Pad raw material uses microspheres, chemically react with foaming agent and with the right mix of additives to achieve the Pad required characteristics.

‧ Can be adjusted according to customer process requirements.

CMP Slurry

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Raw materials - control and manufacturing of microspheres, SiO2, Al2O3, CeO2 abrasive particles, polymer dispersants, purification and refining of raw materials.

 

The technical team consists of members from global multinational companies with extensive experience in the same field.

 

Led by R&D, there are 6 slurry R&D teams, 3 chemical cleaning R&D teams, and 1 raw material development team.

 

High-efficiency manufacturing - vertically integrated manufacturing starting from raw materials, with a high degree of automation, digital data collection and analysis, diversified production equipment, and high cleanliness requirements.

 

Strict quality control - scientific quality control methods, automated SPC detection and triggering, quality inspection at every stage from incoming materials to final products.

Pad Conditioning Disk

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Brazing


Brazing intelligent production system running , 10,000 pcs/ mth.
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Plating


Plating technical R&D completed, currently qualification stage, estimated monthly output of 5,000 pcs.
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CVD


CVD工technical R&D completed able to provide sample to customers if requested.
  • The only company in the world who owns all 3 techniques of CP Disc Production.


    • Comparison of DISK preparation process characteristics

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